JPS6375037U - - Google Patents
Info
- Publication number
- JPS6375037U JPS6375037U JP16975386U JP16975386U JPS6375037U JP S6375037 U JPS6375037 U JP S6375037U JP 16975386 U JP16975386 U JP 16975386U JP 16975386 U JP16975386 U JP 16975386U JP S6375037 U JPS6375037 U JP S6375037U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- wafer
- transfer
- reaction chamber
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 4
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16975386U JPS6375037U (en]) | 1986-11-05 | 1986-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16975386U JPS6375037U (en]) | 1986-11-05 | 1986-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375037U true JPS6375037U (en]) | 1988-05-19 |
Family
ID=31103847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16975386U Pending JPS6375037U (en]) | 1986-11-05 | 1986-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375037U (en]) |
-
1986
- 1986-11-05 JP JP16975386U patent/JPS6375037U/ja active Pending